PROPETIES OF MMIC

(A)The basic material for MMIC in general are subdivided  into four categories

(1) Subtract material: alumina,beryllia,ferrite,Gas retile & sapphire

(2) Conductor material:- aluminum,copper,gold&silver

(3) Dielectric Films: Al₂O_3, sio,sio₂ , si₃N₄ and ta₂

(4) Resistive Film:- cr, cr- Sio Nicr Ta and Ti 

MATERIAL	Tan Φ x 104 At 10 ghz	Relative Dielectric Constant	Thermal conductivity	Application
Alumina	2	10	0.3	Micro strip suspended substrate
Beryllia	1	6	2.5	Compound substrated
Ferrite	2	13-16	.03	Microstripe Coplanar substrate
gaAs	16	13	0.03	High frequency Microstrip MIC
Glass	4	5	0.01	Lumped element
Rutile	4	100	0.02	Microstrip
Sapphire	1	9.3-11.7	0.4	microstrip

Substrate material: a substrate of monolithic microwave integrated circuit is a piece of substrate on which electronic devices are built. The ideal substrate materials should have the following characteristic.

(1) High dielectric constant

(2) Low dissipation factor

(3) High purity and constant thickness

(4) High surface smoothness

(5) High thermal conductivity

Conductor materials: the ideal conductor material for monolithic microwave integrated circuit should have the following properties

(1) High conductivity

(2) Low temperature coefficient

(3) Good adhesion to substrate

(4) Good solder ability